Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500471 | Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object | Matthias Kunkel | 2016-11-22 |
| 9494409 | Test device for testing a bonding layer between wafer-shaped samples and test process for testing the bonding layer | Martin Schönleber | 2016-11-15 |