Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500471 | Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object | Berthold Michelt | 2016-11-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9500471 | Optical measuring device and method for acquiring in situ a stage height between a support and an edge region of an object | Berthold Michelt | 2016-11-22 |