Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530610 | Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams | Kazuhiro Chiba, Hiroshi Matsumoto, Munehiro Ogasawara, Ryoichi Yoshikawa, Hirofumi Morita +6 more | 2016-12-27 |