Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9436102 | Movable body system, movable body drive method, pattern formation apparatus, pattern formation method, exposure apparatus, exposure method, and device manufacturing method | — | 2016-09-06 |
| 9383656 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Takahiro Masada, Tadashi Nagayama | 2016-07-05 |
| 9304412 | Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and measuring method | Yuichi Shibazaki | 2016-04-05 |
| 9256140 | Movable body apparatus, pattern formation apparatus and exposure apparatus, and device manufacturing method with measurement device to measure movable body in Z direction | — | 2016-02-09 |