| 9507267 |
Exposure apparatus, exposure method, and device manufacturing method |
— |
2016-11-29 |
| 9477155 |
Exposure method, exposure apparatus, and device manufacturing method |
— |
2016-10-25 |
| 9442396 |
Exposure apparatus, exposure method, device manufacturing method, and carrier method |
— |
2016-09-13 |
| 9429854 |
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method |
— |
2016-08-30 |
| 9423702 |
Exposure apparatus, exposure method, and device manufacturing method measuring position of substrate stage by switching between encoder and interferometer |
— |
2016-08-23 |
| 9423705 |
Pattern forming apparatus, mark detecting apparatus, exposure apparatus, pattern forming method, exposure method, and device manufacturing method |
— |
2016-08-23 |
| 9423703 |
Exposure apparatus and device manufacturing method measuring position of substrate stage using at least three of four encoder heads |
— |
2016-08-23 |
| 9389517 |
Exposure apparatus, exposure method, and device manufacturing method |
— |
2016-07-12 |
| 9377698 |
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and calibration method |
— |
2016-06-28 |
| 9372414 |
Exposure method and device manufacturing method measuring position of substrate stage using at least three of four encoder heads |
— |
2016-06-21 |
| 9360772 |
Carrier method, exposure method, carrier system and exposure apparatus, and device manufacturing method |
— |
2016-06-07 |
| 9329060 |
Measuring apparatus and method, processing apparatus and method, pattern forming apparatus and method, exposure apparatus and method, and device manufacturing method |
— |
2016-05-03 |
| 9323162 |
Movable body apparatus, exposure apparatus, exposure method, and device manufacturing method |
— |
2016-04-26 |
| 9323160 |
Liquid immersion member, exposure apparatus, exposure method, device fabricating method, program, and recording medium |
— |
2016-04-26 |
| 9304412 |
Movable body drive method and movable body drive system, pattern formation method and apparatus, exposure method and apparatus, device manufacturing method, and measuring method |
Yuho Kanaya |
2016-04-05 |
| 9291917 |
Exposure apparatus, exposure method, and device manufacturing method |
— |
2016-03-22 |
| 9244367 |
Exposure apparatus, exposure method, and device manufacturing method |
— |
2016-01-26 |
| 9229333 |
Exposure apparatus, movable body drive system, pattern formation apparatus, exposure method, and device manufacturing method |
— |
2016-01-05 |