Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9519223 | Surface position detection apparatus, exposure apparatus, and exposure method | Yasuhiro Hidaka | 2016-12-13 |
| 9383656 | Exposure apparatus, exposure method, and method for producing device | Masahiko Yasuda, Takahiro Masada, Yuho Kanaya | 2016-07-05 |