Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9423694 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Koji Shigematsu, Hiroyuki Hirota | 2016-08-23 |
| 9286416 | Scanner based optical proximity correction system and method of use | Jacek Tyminski, Raluca Popescu | 2016-03-15 |