Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9429848 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Hiroyuki Hirota | 2016-08-30 |
| 9423694 | Polarization-modulating element, illumination optical apparatus, exposure apparatus, and exposure method | Osamu Tanitsu, Hiroyuki Hirota, Tomoyuki Matsuyama | 2016-08-23 |
| 9235133 | Lighting optical device, regulation method for lighting optical device, exposure system, and exposure method | Hirohisa Tanaka | 2016-01-12 |