Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513560 | Illumination optical assembly, exposure apparatus, and device manufacturing method | Hiroshi Ooki, Shinichi Nakajima | 2016-12-06 |
| 9379402 | Anion conducting electrolyte membrane and manufacturing method thereof | Kimio YOSHIMURA, Hiroshi Koshikawa, Tetsuya Yamaki, Masaharu Asano, Yasunari Maekawa +5 more | 2016-06-28 |
| 9235133 | Lighting optical device, regulation method for lighting optical device, exposure system, and exposure method | Koji Shigematsu | 2016-01-12 |