Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513560 | Illumination optical assembly, exposure apparatus, and device manufacturing method | Hirohisa Tanaka, Shinichi Nakajima | 2016-12-06 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513560 | Illumination optical assembly, exposure apparatus, and device manufacturing method | Hirohisa Tanaka, Shinichi Nakajima | 2016-12-06 |