Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9518075 | Group 5 cyclopentadienyl transition metal-containing precursors for deposition of group 5 transition metal-containing films | Wontae Noh | 2016-12-13 |
| 9499571 | Germanium- and zirconium-containing compositions for vapor deposition of zirconium-containing films | Julien Lieffrig, Hana Ishii, Christian Dussarrat | 2016-11-22 |
| 9416443 | Method for the deposition of a ruthenium containing film using arene diazadiene ruthenium(0) precursors | Julien Gatineau | 2016-08-16 |