Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9416443 | Method for the deposition of a ruthenium containing film using arene diazadiene ruthenium(0) precursors | Clément Lansalot-Matras | 2016-08-16 |
| 9240319 | Chalcogenide-containing precursors, methods of making, and methods of using the same for thin film deposition | Mao MINOURA, Hana Ishii | 2016-01-19 |