Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514959 | Fluorocarbon molecules for high aspect ratio oxide etch | Curtis Anderson, Rahul Gupta, Vincent M. Omarjee, Nathan Stafford | 2016-12-06 |
| 9499571 | Germanium- and zirconium-containing compositions for vapor deposition of zirconium-containing films | Clément Lansalot-Matras, Julien Lieffrig, Hana Ishii | 2016-11-22 |
| 9384963 | Preparation of cerium-containing precursor and deposition of cerium-containing films | Venkateswara R. Pallem, Wontae Noh | 2016-07-05 |
| 9371338 | Organosilane precursors for ALD/CVD silicon-containing film applications | Glenn Kuchenbeiser, Venkateswara R. Pallem | 2016-06-21 |
| RE45839 | Pentakis(dimethylamino) disilane precursor comprising compound and method for the preparation thereof | — | 2016-01-12 |