Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9382268 | Sulfur containing organosilane precursors for ALD/CVD silicon-containing film applications | Venkateswara R. Pallem | 2016-07-05 |
| 9371338 | Organosilane precursors for ALD/CVD silicon-containing film applications | Christian Dussarrat, Venkateswara R. Pallem | 2016-06-21 |