Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476838 | Hybrid imaging and scatterometry targets | DongSub Choi, Tal Itzkovich | 2016-10-25 |
| 9466100 | Focus monitoring method using asymmetry embedded imaging target | DongSub Choi, Bill Pierson, James Manka, Dongsuk Park | 2016-10-11 |
| 9291920 | Focus recipe determination for a lithographic scanner | James Manka, Christian Sparka | 2016-03-22 |