Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9291920 | Focus recipe determination for a lithographic scanner | James Manka, David Tien | 2016-03-22 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9291920 | Focus recipe determination for a lithographic scanner | James Manka, David Tien | 2016-03-22 |