Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9476838 | Hybrid imaging and scatterometry targets | Tal Itzkovich, David Tien | 2016-10-25 |
| 9466100 | Focus monitoring method using asymmetry embedded imaging target | Bill Pierson, David Tien, James Manka, Dongsuk Park | 2016-10-11 |