Issued Patents 2016
Showing 1–7 of 7 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9446910 | Substrate transfer robot, substrate transfer system, and method for transferring substrate | Daisuke SHIN | 2016-09-20 |
| 9390954 | Substrate transfer robot, substrate transfer system, and method for detecting arrangement state of substrate | — | 2016-07-12 |
| 9358686 | Robot system | — | 2016-06-07 |
| 9293355 | Substrate transfer system and substrate processing system | Masatoshi FURUICHI | 2016-03-22 |
| 9272413 | Conveying system | Masatoshi FURUICHI, Tomohiro Matsuo, Yoshihiro Kusama | 2016-03-01 |
| 9252035 | Substrate transfer system, substrate processing system, and substrate transfer robot | Masatoshi FURUICHI | 2016-02-02 |
| 9252036 | Substrate transfer system, substrate processing system, and substrate transfer robot | Masatoshi FURUICHI | 2016-02-02 |