Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9293355 | Substrate transfer system and substrate processing system | Yoshiki Kimura | 2016-03-22 |
| 9272413 | Conveying system | Yoshiki Kimura, Tomohiro Matsuo, Yoshihiro Kusama | 2016-03-01 |
| 9266234 | Transfer robot and substrate processing apparatus | — | 2016-02-23 |
| 9252035 | Substrate transfer system, substrate processing system, and substrate transfer robot | Yoshiki Kimura | 2016-02-02 |
| 9252036 | Substrate transfer system, substrate processing system, and substrate transfer robot | Yoshiki Kimura | 2016-02-02 |