Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9446910 | Substrate transfer robot, substrate transfer system, and method for transferring substrate | Yoshiki Kimura | 2016-09-20 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9446910 | Substrate transfer robot, substrate transfer system, and method for transferring substrate | Yoshiki Kimura | 2016-09-20 |