Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE46191 | Imprint pattern forming method | Hiroshi TOKUE, Ryoichi Inanami | 2016-11-01 |
| 9403316 | Pattern forming method and pattern forming apparatus | — | 2016-08-02 |
| 9381540 | Pattern forming method | Takeshi Koshiba, Tetsuro Nakasugi | 2016-07-05 |
| 9377777 | Fine processing method, fine processing apparatus, and recording medium with fine processing program recorded thereon | Yasutada Nakagawa, Takuya Kono, Masayuki Hatano | 2016-06-28 |