Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9389513 | Method of forming pattern, system for calculating resist coating distribution and program for calculating the same | — | 2016-07-12 |
| 9381540 | Pattern forming method | Ikuo Yoneda, Tetsuro Nakasugi | 2016-07-05 |