Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| RE46191 | Imprint pattern forming method | Hiroshi TOKUE, Ikuo Yoneda | 2016-11-01 |
| 9329490 | Pattern formation method, mask for exposure, and exposure apparatus | Takashi Sato, Shinichi Ito, Satoshi Tanaka | 2016-05-03 |