Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9435032 | Method for forming patterned conductive film | Tatsuya Shimoda, Zhongrong Shen | 2016-09-06 |
| 9257273 | Charged particle beam apparatus, thin film forming method, defect correction method and device forming method | Yoshihiro Koyama, Anto Yasaka, Tatsuya Shimoda, Ryo Kawajiri | 2016-02-09 |