Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9257273 | Charged particle beam apparatus, thin film forming method, defect correction method and device forming method | Anto Yasaka, Tatsuya Shimoda, Yasuo Matsuki, Ryo Kawajiri | 2016-02-09 |