Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9378858 | Repair apparatus | Fumio Aramaki, Osamu Matsuda, Yasuhiko Sugiyama, Hiroshi Oba, Tomokazu Kozakai +1 more | 2016-06-28 |
| 9336979 | Focused ion beam apparatus with precious metal emitter surface | Fumio Aramaki, Yasuhiko Sugiyama, Tomokazu Kozakai, Osamu Matsuda | 2016-05-10 |
| 9257273 | Charged particle beam apparatus, thin film forming method, defect correction method and device forming method | Yoshihiro Koyama, Tatsuya Shimoda, Yasuo Matsuki, Ryo Kawajiri | 2016-02-09 |