Issued Patents 2016
Showing 1–6 of 6 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9523148 | Process for deposition of titanium oxynitride for use in integrated circuit fabrication | Seiji Okura, Hidemi Suemori | 2016-12-20 |
| 9428842 | Methods for increasing growth rate during atomic layer deposition of thin films | — | 2016-08-30 |
| 9401273 | Atomic layer deposition of silicon carbon nitride based materials | — | 2016-07-26 |
| 9379011 | Methods for depositing nickel films and for making nickel silicide and nickel germanide | Suvi Haukka, Tom E. Blomberg, Eva Tois | 2016-06-28 |
| 9362109 | Deposition of boron and carbon containing materials | — | 2016-06-07 |
| 9315896 | Synthesis and use of precursors for ALD of group VA element containing thin films | Timo Hatanpää, Mikko Ritala, Markku Leskelä | 2016-04-19 |