Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9520315 | Electrostatic chuck with internal flow adjustments for improved temperature distribution | Matthew J. Busche, Wendell Glenn Boyd, Jr., Senh Thach, Konstantin Makhratchev, Masanori Ono | 2016-12-13 |
| 9472410 | Pixelated capacitance controlled ESC | Reza Sadjadi, Wendell Glen Boyd, Jr., Maxim Mikhailovich Noginov | 2016-10-18 |
| 9472435 | Tunable temperature controlled substrate support assembly | Steven E. Babayan, Konstantin Makhratchev, Zhiqiang Guo, Phillip R. Sommer, Dan Marohl | 2016-10-18 |
| 9404176 | Substrate support with radio frequency (RF) return path | Ryan Edwin Hanson | 2016-08-02 |