TI

Toru Ikegami

HH Hitachi High-Technologies: 1 patents #175 of 444Top 40%
Overall (2016): #200,185 of 481,213Top 45%
1
Patents 2016

Issued Patents 2016

Patent #TitleCo-InventorsDate
9297649 Pattern dimension measurement method and charged particle beam apparatus Hiroki Kawada, Norio Hasegawa 2016-03-29