Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9511560 | Processing a sacrificial material during manufacture of a microfabricated product | Guenter Denifl, Daniel Maurer, Joachim Hirschler, Markus Kahn | 2016-12-06 |
| 9439017 | Method for manufacturing a plurality of microphone structures, microphone and mobile device | Ursula Hedenig, Daniel Maurer, Peter Irsigler, Soenke Pirk, Andre Brockmeier | 2016-09-06 |
| 9417186 | Opto-electronic sensor | Bernhard Jakoby, Ventsislav Lachiev, Peter Irsigler, Ursula Hedenig, Sokratis Sgouridis +1 more | 2016-08-16 |
| 9363609 | Method for fabricating a cavity structure, for fabricating a cavity structure for a semiconductor structure and a semiconductor microphone fabricated by the same | Wolfgang Friza, Klaus Muemmler, Guenter Ziegler, Carsten Ahrens | 2016-06-07 |