Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514967 | Plasma processing apparatus | Yasuo Ohgoshi, Michikazu Morimoto, Yuuzou Oohirabaru | 2016-12-06 |
| 9349603 | Plasma processing method | Yoshiharu Inoue, Michikazu Morimoto, Masaki Fujii, Masakazu Miyaji | 2016-05-24 |
| 9305803 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi, Yuuzou Oohirabaru | 2016-04-05 |