Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514967 | Plasma processing apparatus | Yasuo Ohgoshi, Michikazu Morimoto, Tetsuo Ono | 2016-12-06 |
| 9305803 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi, Tetsuo Ono | 2016-04-05 |