Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514967 | Plasma processing apparatus | Michikazu Morimoto, Yuuzou Oohirabaru, Tetsuo Ono | 2016-12-06 |
| 9502217 | Plasma processing apparatus and plasma processing method | Shunsuke Kanazawa, Naoki Yasui, Michikazu Morimoto | 2016-11-22 |
| 9336999 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Naoki Yasui | 2016-05-10 |
| 9305803 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yuuzou Oohirabaru, Tetsuo Ono | 2016-04-05 |