Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9502217 | Plasma processing apparatus and plasma processing method | Shunsuke Kanazawa, Michikazu Morimoto, Yasuo Ohgoshi | 2016-11-22 |
| 9390941 | Sample processing apparatus, sample processing system, and method for processing sample | Seiichi Watanabe, Yutaka Kozuma, Tooru Aramaki, Norihiko Ikeda, Hiroaki Takikawa | 2016-07-12 |
| 9336999 | Plasma processing apparatus and plasma processing method | Michikazu Morimoto, Yasuo Ohgoshi | 2016-05-10 |