Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9510433 | Extreme ultraviolet light generation apparatus | Shinji Nagai, Hitoshi Nagano, Osamu Wakabayashi | 2016-11-29 |
| 9310686 | Target supply device and target supply method | Takayuki Yabu | 2016-04-12 |