Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9517560 | Robot system and calibration method of the robot system | — | 2016-12-13 |
| 9255747 | Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Asumi Jindo, Katsuhiro Inoue, Yuji Katsuda, Takashi Kataigi, Hiroya SUGIMOTO | 2016-02-09 |
| 9257315 | Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Asumi Jindo, Katsuhiro Inoue, Yuji Katsuda, Takashi Kataigi, Hiroya SUGIMOTO | 2016-02-09 |