Issued Patents 2016
Showing 1–9 of 9 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9481813 | Bonding material composition, aluminum nitride bonded body, and method for producing the same | Masashi Goto, Noboru Nishimura | 2016-11-01 |
| 9475733 | Ceramic material and sputtering target member | Yosuke Sato, Yoshinori Isoda | 2016-10-25 |
| 9437463 | Heating device | Nobuyuki Kondo, Morimichi Watanabe, Asumi Jindo, Yosuke Sato, Yoshinori Isoda | 2016-09-06 |
| 9409824 | Ceramic material and sputtering target member | Yosuke Sato, Yoshinori Isoda | 2016-08-09 |
| 9287144 | Heating device | Nobuyuki Kondo, Morimichi Watanabe, Asumi Jindo, Yosuke Sato, Yoshinori Isoda | 2016-03-15 |
| 9257315 | Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Asumi Jindo, Katsuhiro Inoue, Takashi Kataigi, Shingo Amano, Hiroya SUGIMOTO | 2016-02-09 |
| 9257210 | Lanthanum boride sintered body and method for producing the same | Tetsuya Hattori | 2016-02-09 |
| 9255747 | Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Asumi Jindo, Katsuhiro Inoue, Takashi Kataigi, Shingo Amano, Hiroya SUGIMOTO | 2016-02-09 |
| 9245775 | Heating device | Nobuyuki Kondo, Morimichi Watanabe, Asumi Jindo, Yosuke Sato, Yoshinori Isoda | 2016-01-26 |