Issued Patents 2016
Showing 1–5 of 5 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9437463 | Heating device | Nobuyuki Kondo, Morimichi Watanabe, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda | 2016-09-06 |
| 9287144 | Heating device | Nobuyuki Kondo, Morimichi Watanabe, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda | 2016-03-15 |
| 9255747 | Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Katsuhiro Inoue, Yuji Katsuda, Takashi Kataigi, Shingo Amano, Hiroya SUGIMOTO | 2016-02-09 |
| 9257315 | Cooling plate, method for manufacturing the same, and member for semiconductor manufacturing apparatus | Katsuhiro Inoue, Yuji Katsuda, Takashi Kataigi, Shingo Amano, Hiroya SUGIMOTO | 2016-02-09 |
| 9245775 | Heating device | Nobuyuki Kondo, Morimichi Watanabe, Yuji Katsuda, Yosuke Sato, Yoshinori Isoda | 2016-01-26 |