Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9530610 | Blanking aperture array device for multi-beams, and fabrication method of blanking aperture array device for multi-beams | Kazuhiro Chiba, Hiroshi Matsumoto, Munehiro Ogasawara, Hirofumi Morita, Hirokazu Yamada +6 more | 2016-12-27 |
| 9343268 | Multi charged particle beam writing apparatus and multi charged particle beam writing method | Munehiro Ogasawara | 2016-05-17 |
| 9287090 | Multi charged particle beam writing apparatus, and multi charged particle beam writing method | Hiroshi Matsumoto | 2016-03-15 |