Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412565 | Temperature measuring method and plasma processing system | Yusuke Yoshida, Takahiro Senda, Masayuki Kohno, Naoki Matsumoto | 2016-08-09 |
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9412565 | Temperature measuring method and plasma processing system | Yusuke Yoshida, Takahiro Senda, Masayuki Kohno, Naoki Matsumoto | 2016-08-09 |