Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9324571 | Post treatment for dielectric constant reduction with pore generation on low K dielectric films | Kang Sub Yim, Sure Ngo, Alexandros T. Demos | 2016-04-26 |
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9324571 | Post treatment for dielectric constant reduction with pore generation on low K dielectric films | Kang Sub Yim, Sure Ngo, Alexandros T. Demos | 2016-04-26 |