Issued Patents 2016
Showing 1–3 of 3 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9383656 | Exposure apparatus, exposure method, and method for producing device | Takahiro Masada, Yuho Kanaya, Tadashi Nagayama | 2016-07-05 |
| 9348238 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Taro Sugihara | 2016-05-24 |
| 9298108 | Position measurement method, position control method, measurement method, loading method, exposure method and exposure apparatus, and device manufacturing method | Taro Sugihara | 2016-03-29 |