Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507251 | Method for manufacturing reflective mask and apparatus for manufacturing reflective mask | Tomoaki Yoshimori, Makoto Karyu, Takeharu MOTOKAWA, Yoshihisa Kase | 2016-11-29 |
| 9280044 | Light-reflective photomask and mask blank for EUV exposure, and manufacturing method of semiconductor device | — | 2016-03-08 |