TM

Takeharu MOTOKAWA

SM Shibaura Mechatronics: 1 patents #2 of 16Top 15%
TO Topcon: 1 patents #24 of 79Top 35%
Overall (2016): #211,182 of 481,213Top 45%
1
Patents 2016

Issued Patents 2016

Showing 1–1 of 1 patents

Patent #TitleCo-InventorsDate
9507251 Method for manufacturing reflective mask and apparatus for manufacturing reflective mask Tomoaki Yoshimori, Makoto Karyu, Kosuke TAKAI, Yoshihisa Kase 2016-11-29