Issued Patents 2016
Showing 1–1 of 1 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9507251 | Method for manufacturing reflective mask and apparatus for manufacturing reflective mask | Tomoaki Yoshimori, Makoto Karyu, Takeharu MOTOKAWA, Kosuke TAKAI | 2016-11-29 |