Issued Patents 2016
Showing 1–10 of 10 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9513476 | Microelectromechanical component and corresponding production method | — | 2016-12-06 |
| 9422152 | Hybridly integrated module having a sealing structure | — | 2016-08-23 |
| 9409764 | Microelectromechanical component and manufacturing method for microelectromechanical components | — | 2016-08-09 |
| 9411154 | Micro-electromechanical reflector and method for manufacturing a micro-electromechanical reflector | — | 2016-08-09 |
| 9406747 | Component in the form of a wafer level package and method for manufacturing same | Heribert Weber, Hartmut Kueppers, Jens Frey, Neil Davies | 2016-08-02 |
| 9372341 | Comb drive including a pivotable mirror element | Hans Artmann, Peter Sudy | 2016-06-21 |
| 9344806 | Component having a micro-mechanical microphone structure and method for producing the component | — | 2016-05-17 |
| 9309111 | Micromechanical component and method for producing a micromechanical component | Hans Artmann | 2016-04-12 |
| 9309107 | Micromechanical system and corresponding manufacturing method | Andreas Scheurle, Christian Bierhoff | 2016-04-12 |
| 9227837 | Sensor and method for manufacturing a sensor | — | 2016-01-05 |