Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9484243 | Processing chamber with features from side wall | Dean J. Larson, Andreas Fischer, Andre DESEPTE, Harmeet Singh | 2016-11-01 |
| 9412555 | Lower electrode assembly of plasma processing chamber | Quan Chau, Keith Gaff, Hanh Tuong Ha, Brett C. Richardson, Harmeet Singh | 2016-08-09 |