Issued Patents 2016
Showing 1–2 of 2 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9418867 | Mask passivation using plasma | Byungkook Kong, Hung Sang Kim, Jeong Hyun Yoo, Jun Wan Kim | 2016-08-16 |
| 9390923 | Methods of removing residual polymers formed during a boron-doped amorphous carbon layer etch process | Jeong Hyun Yoo, Byungkook Kong | 2016-07-12 |