Issued Patents 2016
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514927 | Plasma pre-clean module and process | John Tolle, Matthew G. Goodman, Robert Vyne | 2016-12-06 |
| 9299557 | Plasma pre-clean module and process | John Tolle, Matthew G. Goodman, Robert Vyne | 2016-03-29 |