Issued Patents 2016
Showing 1–4 of 4 patents
| Patent # | Title | Co-Inventors | Date |
|---|---|---|---|
| 9514927 | Plasma pre-clean module and process | Matthew G. Goodman, Robert Vyne, Eric Hill | 2016-12-06 |
| 9474163 | Germanium oxide pre-clean module and process | Matthew G. Goodman | 2016-10-18 |
| 9396934 | Methods of forming films including germanium tin and structures and devices including the films | — | 2016-07-19 |
| 9299557 | Plasma pre-clean module and process | Matthew G. Goodman, Robert Vyne, Eric Hill | 2016-03-29 |